A new technical paper titled “Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry” was published by researchers at IMEC and KU Leuven. ...
Researchers raise fundamental questions about the proposed value of topological protection against backscattering in integrated photonics. The field of integrated photonics has taken off in recent ...
A Rutherford backscattering spectrometer (RBS) system can be applied to the study of surface coatings. The technique permits the study of inhomogeneous surface layers, including a determination of the ...
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