One of these reactors can accommodate 6” wafers. 1 Plasma ALD reactor equipped with an in situ spectroscopic ellipsometer. 2 Hot wall rotary reactors for coating or etching particles using ALD/MLD or ...

Another innovative concept for the realisation of thermochemical processes is the rotary kiln reactor. A sophisticated transport system continuously guides the particles through the reactor, where ...

Commercial gas cooled reactors are currently in use only in the United Kingdom. International interest in developing high temperature gas cooled reactors is increasing because they can provide ...

Riffle flights enable similar benefits as standard continuous stirred tank reactors (CSTR), but in a continuous rotary tube format. Helical flights – convey material without back-mixing. These are ...