This paper describes the present status of statistical process control from the view-point of the statistician. It summarizes twenty papers dating from early 1930 to the present. It indicates the ...

When it comes to process-control systems, reliability is crucial and failure can be costly or dangerous. A combination of good design practices, component selection, and testing can enhance ...

Across the semiconductor industry, both FD-SOI and finFET transistor technologies are in high volume production, with IC manufacturers looking to extend both technologies to gain additional ...

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay ...

Technology progression within advanced process control (APC) continues to evolve; however, it is the relationship among core APC developments, enabling technologies, and management practices that is ...